Oxide thickness (μm) 1. Thermal oxidation is a way to produce a thin layer of oxide on the surface of a material. There are two types of thermal oxidation of silicon, dry oxidation and wet oxidation, Write the balanced equations for both types. Fill out the legend for the following graph 1.6 1.4 1.2 1 0.8 0.6 0.4 0.2 0 -1/700 -1/900 -1/T (o C) -1/1100

Chemistry by OpenStax (2015-05-04)
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Chapter4: Stoichiometry Of Chemical Reactions
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Problem 26E: When heated to 700—800 C, diamonds, which are pure carbon, are oxidized by atmospheric oxygen. (They...
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Oxide thickness (μm)
1. Thermal oxidation is a way to produce a thin layer of oxide on the surface of a
material. There are two types of thermal oxidation of silicon, dry oxidation and
wet oxidation,
Write the balanced equations for both types.
Fill out the legend for the following graph
1.6
1.4
1.2
1
0.8
0.6
0.4
0.2
0
-1/700
-1/900
-1/T (o C)
-1/1100
Transcribed Image Text:Oxide thickness (μm) 1. Thermal oxidation is a way to produce a thin layer of oxide on the surface of a material. There are two types of thermal oxidation of silicon, dry oxidation and wet oxidation, Write the balanced equations for both types. Fill out the legend for the following graph 1.6 1.4 1.2 1 0.8 0.6 0.4 0.2 0 -1/700 -1/900 -1/T (o C) -1/1100
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